Which of the following molecule(s) is/are non-planar?

The presence of a sp³ hybridized carbon (or nitrogen) atom or two sp² hybridized carbon/nitrogen atoms separated by an even number of double bonds and no single bonds will prevent the molecule from becoming planar. Otherwise, it might be planar due to its structure.

${\stackrel{°}{\mathrm{C}}\mathrm{F}}_3\left(s{p}^3\right),{\stackrel{°}{ \mathrm{C}}\mathrm{H}}_3\left(s{p}^2\right)$ In between these two. hyb. is in between $s{p}^2-s{p}^3$.

${\mathrm{ClO}}_3^{-}$ is bond pair of 3 and pyramidal geometry are non-planar.

Hence, the option D is correct.